JPH0361510B2 - - Google Patents

Info

Publication number
JPH0361510B2
JPH0361510B2 JP57163451A JP16345182A JPH0361510B2 JP H0361510 B2 JPH0361510 B2 JP H0361510B2 JP 57163451 A JP57163451 A JP 57163451A JP 16345182 A JP16345182 A JP 16345182A JP H0361510 B2 JPH0361510 B2 JP H0361510B2
Authority
JP
Japan
Prior art keywords
sample
supply pipe
coating
wafer
gas supply
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP57163451A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5952563A (ja
Inventor
Satoshi Araihara
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP16345182A priority Critical patent/JPS5952563A/ja
Publication of JPS5952563A publication Critical patent/JPS5952563A/ja
Publication of JPH0361510B2 publication Critical patent/JPH0361510B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Coating Apparatus (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
JP16345182A 1982-09-20 1982-09-20 コ−テイング装置 Granted JPS5952563A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP16345182A JPS5952563A (ja) 1982-09-20 1982-09-20 コ−テイング装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP16345182A JPS5952563A (ja) 1982-09-20 1982-09-20 コ−テイング装置

Publications (2)

Publication Number Publication Date
JPS5952563A JPS5952563A (ja) 1984-03-27
JPH0361510B2 true JPH0361510B2 (en]) 1991-09-20

Family

ID=15774126

Family Applications (1)

Application Number Title Priority Date Filing Date
JP16345182A Granted JPS5952563A (ja) 1982-09-20 1982-09-20 コ−テイング装置

Country Status (1)

Country Link
JP (1) JPS5952563A (en])

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6251221A (ja) * 1985-08-30 1987-03-05 Nec Kyushu Ltd 塗布装置
JPS62198122A (ja) * 1986-02-26 1987-09-01 Hitachi Ltd 半導体処理装置
JPS6482628A (en) * 1987-09-25 1989-03-28 Toshiba Corp Photoresist processing device
JPH01254277A (ja) * 1988-03-31 1989-10-11 Matsushita Electric Ind Co Ltd スピナー回転処理装置
JPH0734887B2 (ja) * 1990-03-15 1995-04-19 松下電器産業株式会社 薄膜製造装置

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2214827C3 (de) * 1972-03-27 1975-05-22 Deutsche Gold- Und Silber-Scheideanstalt Vormals Roessler, 6000 Frankfurt Verfahren zur Herstellung von Alkaliferrocyaniden
JPS56113377A (en) * 1980-02-12 1981-09-07 Fujitsu Ltd Rotary coater

Also Published As

Publication number Publication date
JPS5952563A (ja) 1984-03-27

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